From all-round academic master to chief scientist - Chapter 238 A verbal battle with the Confucians

The old man said: “Good morning, dear scientists, everyone’s time is precious, so I will keep it short and briefly talk about the purpose of this meeting.”

“In recent years, we have been developing into the semiconductor industry chain, and today we have achieved certain fruitful results. Some time ago, under the leadership of Mr. Lin Xiao, we have achieved breakthroughs in multiple technologies, especially silicon wafers. The circle production technology has achieved a major breakthrough and reached a world-class level.”

Speaking of this, he nodded towards Lin Xiao and then continued: “Research on semiconductor technology is a top priority, and we need to achieve more innovation in this technology in the future.”

“Now, everyone can talk about your views, talk about the new breakthroughs in your respective technologies, and discuss which direction we should develop next.”

As the old man finished speaking, the people present began to discuss.

After a while, an expert from Huaxin International raised his hand and said: “Recently, we have achieved a key breakthrough in the chip production process and are one step closer to the 12nm process. We need more research and development in this aspect. Commit.”

“I think we still need to increase investment in production technology. After all, it is still far away to build our own lithography machine. It is better to figure out how to push the DUV lithography machine to its limit.”

As soon as this was said, others were unwilling to do so.

For example, Dianke Group, Changchun Institute of Optics and Mechanics, and Modu Microelectronics have all been tasked with developing lithography machines. Huaxin International advocates vigorously improving production processes, but of course they are not willing to do so.

So these three companies immediately expressed their opposition.

“Why don’t we do it if we can’t do it? Don’t look at how much we have lost now because we didn’t do it.”

“You talk about improving the production process, but you haven’t seen how much you have done? TSMC has 12nm and 10nm processes, let alone 14nm. I don’t ask you to keep up with 7nm, but at least it won’t be so many generations behind, right?”

…

The words spoken by both parties were very rude, and naturally, they started to quarrel.

Of course, after all, it was an occasion like this. When they quarreled, they always accused each other of problems in technological development.

But when they were arguing, someone else said, “I think we should work harder on the materials?”

There are still many people present who produce materials. When someone mentioned this, they immediately agreed.

“Yes, we should also focus on the development of materials!”

There was another voice in the conference room again.

This is the semiconductor industry chain. Every link is closely connected, and there are large technical barriers between each link.

While these people were arguing, someone suddenly clapped their hands, and everyone saw that it was Director Ma.

For the director of the Science and Technology Bureau, everyone here still maintained a respectful attitude, so they all became quiet and waited for him to speak.

Ma Gaoliang just smiled and then said: “What everyone said is very reasonable, but everyone also knows that if we want to keep up with foreign countries, we are still far behind in all aspects. Now we are only in silicon wafer production. This brings us to world-class status.”

“So I thought, should we listen to Professor Lin’s opinion first?”

Hearing this, the experts present fell silent.

No matter what, Lin Xiao’s recent achievement alone deserves their serious attention.

So everyone turned their attention to Lin Xiao sitting in front.

Lin Xiao was a little surprised that it was his turn to speak. However, he had already prepared to share his thoughts, so he was not in a hurry.

After sitting down, he first smiled at the old man on his right, then turned back to look at the people present, and then said: “My opinion is that both hands must be grasped, and both hands must be hard.”

“Of course, this sentence applies to the entire industry chain, that is, the entire industry chain must be grasped.”

Everyone present was stunned for a moment.

What does Lin Xiao mean?

Does he think all directions should be developed?

People present couldn’t help but shake their heads. They thought Lin Xiao could say something that would make people’s eyes shine. But now that he said this, it seemed to everyone that he didn’t want to offend anyone and maintained a moderate attitude.

However, is this really Lin Xiao’s plan?

After saying this, he stood up.

“The semiconductor industry is a complete industrial chain, and every part of the industrial chain plays a very important role. Since we have our special system, we can form a game of chess to play, so I think we should form a semiconductor industry. The alliance will pool resources from all parties to better develop our entire industry.”

“Now, we have achieved a breakthrough in silicon wafer production. At the same time, due to the emergence of the eight-part structure of the encoder, our precision processing technology has also achieved a breakthrough. What is left is to continue to dig deeper. “

“Here, I will first briefly describe how to achieve breakthroughs in the optical lens production technology used in photolithography machines.”

Speaking of this, Lin Xiao smiled slightly at Luo Gangxian, but Luo Gangxian was stunned. Lin Xiao wanted to talk about their optical lenses?

Lin Xiao said: “How to make optical lenses more precise is nothing more than getting rid of those raised particles on the surface of the lenses.”

“We can use a laser interferometer to find these raised particles. Then, depending on the amount of raised particles, we can bombard these raised particles with ion beams, and then ‘knock’ our lenses flat. .”

“This allows our lenses to be incredibly flat.”

Hearing Lin Xiao’s thoughts, Luo Gangxian couldn’t help but said: “This… this shouldn’t be possible, right? We can only make statistics on the surface roughness data obtained by the laser interferometer, but we are still unable to specifically determine what to do. Use ion beams to bombard! Moreover, the radius of silicon atoms has reached more than 100 picometers, and the diameter is equal to more than 200 picometers. What we need is a level below 100 picometers. If it is ion bombardment, the surface atoms can be directly bombarded with ions. If it is bombarded, what may be left is a pit of more than 100 picometers, which still cannot meet the requirements of the photolithography machine lens!”

What Lin Xiao said is indeed a good method, but it is theoretically speaking. As a professional, he does not believe that this can be done at all.

Lin Xiao just smiled and said, “I didn’t say that I would blow away these raised particles, Academician Luo.”

“I said ‘knock it flat’!”

“We only need to calculate the bombardment angle and control the horizontal and vertical components, and we can completely flatten its surface.”

“Moreover, what we call the atomic radius is actually just the atomic orbital radius. In terms of the force range, they are not a ball. Bombarding them with ion beams is just the electromagnetic force between them.”

“Previous ion polishing technology used argon plasma. During bombardment, we can achieve this by considering its charge.”

Hearing this, Luo Gangxian suddenly felt incredible. Does it really seem possible to say this?

But after a moment of thinking, he shook his head slightly and said: “It can’t be done, it’s mathematically impossible! How do you calculate the bombardment angle?”

Lin Xiao smiled: “It’s just a math problem. What I’m not afraid of the most is math problems.”

“this……”

Luo Gangxian’s words were stagnant.

Just a math problem?

That’s it?

He didn’t know what to say, but looking at Lin Xiao’s look, he couldn’t find any reason to continue questioning.

It seems like this is really possible?

If they can calculate the ion beam impact angle, does it seem entirely possible to “knock” those particles in?

In fact, this is similar to an ion polishing technology, but compared to the more common ion polishing technologies, their technology requires a little higher precision.

And to solve this problem, isn’t the most important thing about mathematics?

Thinking of this, he looked at Lin Xiao who had walked to the other side of the oval table, stood up and said, “Professor Lin, you have convinced me, let’s cooperate.”

Lin Xiao smiled and said, “Of course you can, but…”

He glanced at everyone present and said: “Everyone, I just said that we are going to form an alliance, so I want to work with all of you.”

“And if you encounter technical problems, you can come to me for cooperation and research.”

Hearing this, everyone present suddenly widened their eyes.

Lin Xiao’s words were intended to bring together the institutions and companies represented by all of them?

He even said that if you encounter technical problems, you can come to him for cooperation?

Although Lin Xiao has solved CMP material technology, silicon wafer purification technology, and even achieved a major breakthrough in encoder accuracy, he can be called an all-round talent.

But in so many industries where they are present, how can Lin Xiao be omnipotent?

Someone immediately expressed opposition: “Professor Lin, your proposal is very good, but do you know how to solve the problem of extreme ultraviolet light sources? This is the first question we want to ask you.”

Lin Xiao smiled: “The extreme ultraviolet light source uses nothing more than excimer laser irradiation on the tin target and de-excitation to produce extreme ultraviolet light. What we have to do is to increase its power.”

“In this regard, we only need to control the power of the tin target and the excimer laser so that the tin target can accept a greater irradiation rate of the excimer laser, and then we can achieve a stronger deexcitation effect.”

“How to achieve a higher irradiation rate for tin targets requires mathematical calculations and experimental verification. Mathematical issues are not a problem for me, so after you cooperate with me, we will also have the opportunity to achieve breakthroughs.”

“In addition, there is also our EUV light collection efficiency. As long as we can achieve the more precise processing of the lenses I just mentioned, our collection efficiency can be increased again, thereby increasing the power.”

Hearing Lin Xiao’s answer, the person who objected was speechless again, because he found that he had been persuaded by Lin Xiao.

If they can really cooperate with Lin Xiao, can their problems really be solved?

At this time, someone asked again: “Professor Lin, where is the optical path system?”

Lin Xiao smiled again and said: “The optical path system, first of all, we need to make breakthroughs in the field of precision control, and I believe that now we have such an opportunity.”

“The next step is still a math problem. Believe me, as long as it involves math problems, it’s not a problem.”

No one present knew what to say.

Math problem?

In addition to material issues and precision machining issues, aren’t the rest of their problems just mathematical issues?

Many people don’t know how to ask anymore.

Of course, those who study materials have something to say: “Where is our photoresist?”

Lin Xiao said: “It took me two months to solve the CMP polishing material. Although I can’t guarantee the other materials, maybe I will be lucky enough to solve it too?”

“Ah this…”

“Professor Lin, and us…”

…

Lin Xiao answered them one by one and convinced them one by one.

It’s like talking to a group of scholars.

He had already had the idea of ​​forming such an alliance.

Now, his achievements in semiconductors have given him the honor to mention this matter.

Today’s meeting just gave him the opportunity to propose this idea.

In this way, the faces of everyone present showed expressions of emotion as he spoke.

They all seemed convinced by him.

Seeing this scene, Lin Xiaosong looked seriously and said: “I don’t want to steal your things, I just think it is necessary for us to establish such an alliance to better mobilize our resources.”

“Friends, we are still far behind foreign countries, and cooperation is more important.”

“I don’t want to argue with you here.”

“At the same time, I also ask everyone to believe in me. I also have this confidence.”

There was silence in the conference room for a moment.

Academician Luo Gangxian, director of the Institute of Optoelectronics, said: “I agree.”

After someone started, other people who were still undecided also said: “We also agree.”

“agree.”

This matter has no impact on their interests. They just find it troublesome and don’t think it will mean anything to them after joining.

But now, Lin Xiao has convinced them.

Seeing that these people actually agreed, Ma Gaoliang couldn’t help but look at Lin Xiao, with admiration in his eyes.

Lin Xiao is probably the only one who can convince so many people.

The old man who had been silent all this time looked at Lin Xiao with a lot of appreciation in his eyes.

Then, he said: “Very good, I am very happy that you can cooperate. Then, as a witness, I will give your alliance a name.”

Hearing what the old man said, Lin Xiao smiled and said, “Of course this is the best.”

The old man smiled and said: “Then let’s call it Huaxin Alliance. It’s simple and direct.”

“In addition, Professor Lin, if you need anything in the future, just contact Gao Liang, and I will ask him to fully cooperate with you.”

“good!”

Lin Xiao nodded heavily.

…